With a linear flying height measurement
system, the ABS shape should not change as a function of flying height or
pitch. To test MicroPhysics new FHT system, we measured a number of points
along one rail of a two-rail glide head at a variety of spindle speeds.
This type of head was chosen to provide linearity data over a large range: 4 to
175 nm.
Magnification of the low-flying height
region is provided below:
We replot this data as flying height vs
point location, effectively showing the slider shape in the flying height
profile at various spindle RPM values.
This plot shows 1 HGA measured 1 time
at each of 9 different spindle speeds. The 9 points are spaced 0.1 mm
apart.
We remove the slope and offset by
subtracting a simple linear fit to each set of 9 points
Data from 9 spindle speeds after
subtracting linear fit
The above plot shows the maximum
deviations from average of overlaid data. This is the envelope of the data
after subtracting the average slider shape. Also shown below each point is
the range of flying heights that correspond to each measurement point. For
example, point Crn1 had flying heights from 4 to 19 nm while point Crn9 had
flying heights from 57 to 191 nm..
The average deviation ( 9 points x 9
speeds) = 1.4 Angstroms which includes not only linearity,
but also repeatability effects.
Above, the standard deviations of the
data are plotted. The pooled standard deviation is 2.0 Angstroms.
We believe that this level of linearity
has never been previously demonstrated. Furthermore this was done at flying
heights down to 4 nm with no
retract calibration required. This
new flying height tester may be the answer to your concerns about measurement
accuracy and correlation for low-flying sliders. Please contact us for
more information.
Specifications subject
to change without notice or obligation.
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